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Review of electrical characterization of ultra-shallow junctions with micro four-point probes: Journal of Vacuum Science & Technology B: Vol 28, No 1
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a) THz-TDS and M4PP correlation for three different samples termed 'Cu... | Download Scientific Diagram
Resistance vs temperature of a fs a-C before and after RIE etching of... | Download Scientific Diagram
a) SEM image of micro 12-point probe. (b) M4PP with four cantilevers... | Download Scientific Diagram
Illustration of the four different probe configurations (A, A 0 , B, and | Download Scientific Diagram
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Review of electrical characterization of ultra-shallow junctions with micro four-point probes: Journal of Vacuum Science & Technology B: Vol 28, No 1
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a) THz-TDS and M4PP correlation for three different samples termed 'Cu... | Download Scientific Diagram
Review of electrical characterization of ultra-shallow junctions with micro four-point probes: Journal of Vacuum Science & Technology B: Vol 28, No 1